Effects of nonlocal electron kinetics and transition from α to γ regime in an RF capacitive discharge in nitrogen

Author

Tatarova, Elena ; Stoykova, Eli ; Bachev, Kostadin ; Zhelyazkov, Ivan

Author_Institution

Centro de Fisica de Plasmas, Inst. Superior Tecnico, Lisbon, Portugal

Volume

26

Issue

2

fYear

1998

fDate

4/1/1998 12:00:00 AM

Firstpage

167

Lastpage

174

Abstract

The electron kinetics and regime of operation of asymmetrically coupled RF (27-MHz) nitrogen discharges in two vessels with different interelectrode gaps over the range of 0.20-0.35 torr gas pressure are studied in terms of the electron energy distribution function (EEDF). The latter is measured by means of a computer-controlled data acquisition system, a Langmuir probe with cross-modulation second derivative technique applied. The experiments are performed with an axial resolution along the RF electric field and accompanied with a measurement of electrical discharge characteristics. The effects of local and nonlocal plasma response are considered. The transition between α and γ discharge regimes is registered by measuring the EEDF and its moments´ changes with the increase of the RF discharge current density

Keywords

Langmuir probes; high-frequency discharges; nitrogen; plasma transport processes; α to γ regime transition; 0.20 to 0.35 torr; 27 MHz; Langmuir probe; N₂; RF capacitive discharge; RF electric field; computer-controlled data acquisition system; cross-modulation second derivative technique; electrical discharge characteristics; electron energy distribution function; interelectrode gaps; local plasma response; nonlocal electron kinetics; nonlocal plasma response; Data acquisition; Distribution functions; Electrons; Energy resolution; Kinetic theory; Nitrogen; Performance evaluation; Plasma measurements; Probes; Radio frequency;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.669620

Filename

669620