DocumentCode
1368611
Title
Guest Editorial Special Section On ICMTS´97
Author
Bair, L.A.
Volume
11
Issue
2
fYear
1998
fDate
5/1/1998 12:00:00 AM
Firstpage
181
Lastpage
181
Keywords
CMOS technology; Certification; Conferences; Feedback; Interface states; MOSFETs; Manufacturing processes; Materials testing; Microelectronics; Very large scale integration;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.1998.670149
Filename
670149
Link To Document