Title :
Quasi-TEM analysis of coplanar waveguides with an inhomogeneous semiconductor substrate
Author_Institution :
Dept. of Electr. Eng., Nat. Chung-Hsing Univ., Taichung, Taiwan
fDate :
9/1/1996 12:00:00 AM
Abstract :
In this paper, we study the normalized wavelength and attenuation constant of coplanar waveguides with a finite metal thickness. The substrate is a lossy inhomogeneous insulator-semiconductor, and the conductor is assumed perfect. Electroquasi-static approximation is used to derive a Laplace´s equation with a complex permittivity in each inhomogeneous layer, from which the eigenmodes are obtained. Proper boundary conditions between contiguous layers are applied to calculate the charge distribution on the center conductor. The effects of the insulator depth and semiconductor conductivity on the normalized wavelength and attenuation constant are analyzed
Keywords :
Laplace equations; coplanar waveguides; electric charge; substrates; waveguide theory; CPW; Laplace equation; attenuation constant; boundary conditions; charge distribution; complex permittivity; coplanar waveguides; eigenmodes; electroquasi-static approximation; finite metal thickness; inhomogeneous semiconductor substrate; insulator depth; lossy inhomogeneous insulator-semiconductor; normalized wavelength; quasi-TEM analysis; semiconductor conductivity; Attenuation; Capacitance; Conductors; Coplanar waveguides; Electron devices; HEMTs; Insulation; Semiconductor waveguides; Substrates; Threshold voltage;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
