Title :
Linear microvibromotor for positioning optical components
Author :
Daneman, Michael J. ; Tien, Norman C. ; Solgaard, Olav ; Pisano, Albert P. ; Lau, Kam Y. ; Muller, Richard S.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
fDate :
9/1/1996 12:00:00 AM
Abstract :
We report an electrostatically driven linear microvibromotor fabricated using surface-micromachining technology. This device is developed for use in actuated micro-optical systems on silicon. Its submicron positioning resolution and a travel range of over 350 μm are excellent properties for this application. Vibromotor precision and velocity are characterized, and various drive methods are discussed. A simulation of the vibromotor dynamics is presented to explore optimization and control issues for this device
Keywords :
linear motors; microactuators; micromachining; micromotors; optical elements; position control; actuated micro-optical systems; drive methods; electrostatically driven linear micromotor; linear microvibromotor; motor dynamics; optical component positioning; submicron positioning resolution; surface-micromachining technology; travel range; vibromotor precision; Actuators; Arm; Associate members; Electrostatics; Flanges; Motion control; Optical devices; Q factor; Resonance; Voltage;
Journal_Title :
Microelectromechanical Systems, Journal of
