Title :
Highly uniform and reproducible vertical-cavity surface-emitting lasers grown by metalorganic vapor phase epitaxy with in situ reflectometry
Author :
Hou, H.Q. ; Chui, H.C. ; Choquette, K.D. ; Hammons, B.E. ; Breiland, W.G. ; Geib, K.M.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
Vertical-cavity surface-emitting lasers (VCSELs) were grown by metalorganic vapor phase epitaxy. Excellent uniformity of Fabry-Perot cavity wavelength for VCSEL materials of /spl plusmn/0.2% across a 3-in diameter wafer was achieved. This results in excellent uniformity of the lasing wavelength and threshold current of VCSEL devices. Employing pregrowth calibrations on growth rates periodically with an in situ reflectometer, we obtained a run-to-run wavelength reproducibility for 770- and 850-nm VCSELs of /spl plusmn/0.3% over the course of more than a hundred runs.
Keywords :
optical fabrication; reflectometry; semiconductor lasers; surface emitting lasers; vapour phase epitaxial growth; 3 in; 770 nm; 850 nm; Fabry-Perot cavity; MOVPE growth; VCSEL; in situ reflectometry; metalorganic vapor phase epitaxy; pregrowth calibration; threshold current; vertical-cavity surface-emitting laser; wavelength reproducibility; wavelength uniformity; Calibration; Epitaxial growth; Epitaxial layers; Inductors; Optical materials; Optical surface waves; Reflectivity; Reproducibility of results; Surface emitting lasers; Vertical cavity surface emitting lasers;
Journal_Title :
Photonics Technology Letters, IEEE
