DocumentCode :
1368807
Title :
Two-Axis Gimbal-Less Electrothermal Micromirror for Large-Angle Circumferential Scanning
Author :
Xu, Yingshun ; Singh, Janak ; Selvaratnam, Thevapriya ; Chen, Nanguang
Author_Institution :
Agency for Sci., Technol. & Res. (A* STAR), Inst. of Microelectron., Singapore, Singapore
Volume :
15
Issue :
5
fYear :
2009
Firstpage :
1432
Lastpage :
1438
Abstract :
In this paper, we present the design, simulation, fabrication, and characterization of a two-axis gimbal-less micromirror optimized for large-angle circumferential scanning applications. The single-crystal silicon micromirror consists of novel folded bimorph electrothermal actuators, flexural springs, and a mirror plate coated with a high-reflective Cr/Au thin film. A modified silicon-on-insulator microelectromechanical system process has been applied on the micromirror fabrication. The single-wafer process is based on deep reactive ion etching in order to achieve high fill factor as well as small outline of the micromirror chip. A new mechanical design of bimorph actuators is developed to further increase the mechanical deflection. Both theoretical and experimental results demonstrate that the micromirror can provide a uniform mechanical deflection up to ~9deg with multichannel driving voltages of less than 2.3 V to any angle in full 360deg circumference.
Keywords :
chromium; gold; metallic thin films; micro-optomechanical devices; microactuators; microfabrication; micromirrors; optical fabrication; silicon-on-insulator; springs (mechanical); sputter etching; Si-Cr-Au; deep reactive ion etching; fill factor; flexural springs; folded bimorph electrothermal actuators; large-angle circumferential scanning; mechanical deflection; mechanical design; microelectromechanical system; silicon-on-insulator; single crystal; single-wafer process; two-axis gimbal-less micromirror; Electrothermal effects; microelectromechanical devices; micromachining;
fLanguage :
English
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
Publisher :
ieee
ISSN :
1077-260X
Type :
jour
DOI :
10.1109/JSTQE.2009.2016436
Filename :
5238517
Link To Document :
بازگشت