• DocumentCode
    1369196
  • Title

    Dual-Chirality Helical Nanobelts: Linear-to-Rotary Motion Converters for Three-Dimensional Microscopy

  • Author

    Dong, Lixin ; Zhang, Li ; Kratochvil, Bradley E. ; Shou, Kaiyu ; Nelson, Bradley J.

  • Author_Institution
    Inst. of Robot. & Intell. Syst., ETH Zurich, Zurich, Switzerland
  • Volume
    18
  • Issue
    5
  • fYear
    2009
  • Firstpage
    1047
  • Lastpage
    1053
  • Abstract
    A linear-to-rotary motion converter is demonstrated using 3-D SiGe/Si dual-chirality helical nanobelts (DCHNBs). Analytical and experimental investigation shows that the motion conversion has excellent linearity for small deflections. The conversion ratios of displacement and load for a SiGe/Si DCHNB (an 8-nm-thick Si0.6Ge0.4 and a 10-nm-thick Si layer) are found to be 171.3deg/mum and 2.110 times 10-6 Nmiddotm/N, respectively. The stiffness (0.033 N/m) is much smaller than that of bottom-up synthesized helical nanostructures, which is promising for high-resolution force measurement in nanoelectromechanical systems. To perform torque measurement, two atomic force microscope cantilevers are used for simultaneous characterization of axial and radial properties of the same nanostructure. An application related to 3-D imaging is shown in a scanning electron microscope. The ultracompact size makes it possible for DCHNBs to serve as rotary stages for creating 3-D scanning probe microscopes or microgoniometers.
  • Keywords
    Ge-Si alloys; atomic force microscopy; cantilevers; chirality; elemental semiconductors; nanoelectromechanical devices; scanning electron microscopy; silicon; torque measurement; 3-D imaging; 3-D scanning probe microscopes; Si0.6Ge0.4-Si; atomic force microscope; cantilevers; conversion ratio; dual-chirality helical nanobelts; linear-to-rotary motion converter; microgoniometers; nanoelectromechanical systems; scanning electron microscope; size 10 nm; size 8 nm; three-dimensional microscopy; torque measurement; 3-D scanning probe microscope (SPM); Helical nanobelt (HNB); microgoniometer; motion converter; nanoelectromechanical systems (NEMS);
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2009.2029975
  • Filename
    5238575