DocumentCode :
1369196
Title :
Dual-Chirality Helical Nanobelts: Linear-to-Rotary Motion Converters for Three-Dimensional Microscopy
Author :
Dong, Lixin ; Zhang, Li ; Kratochvil, Bradley E. ; Shou, Kaiyu ; Nelson, Bradley J.
Author_Institution :
Inst. of Robot. & Intell. Syst., ETH Zurich, Zurich, Switzerland
Volume :
18
Issue :
5
fYear :
2009
Firstpage :
1047
Lastpage :
1053
Abstract :
A linear-to-rotary motion converter is demonstrated using 3-D SiGe/Si dual-chirality helical nanobelts (DCHNBs). Analytical and experimental investigation shows that the motion conversion has excellent linearity for small deflections. The conversion ratios of displacement and load for a SiGe/Si DCHNB (an 8-nm-thick Si0.6Ge0.4 and a 10-nm-thick Si layer) are found to be 171.3deg/mum and 2.110 times 10-6 Nmiddotm/N, respectively. The stiffness (0.033 N/m) is much smaller than that of bottom-up synthesized helical nanostructures, which is promising for high-resolution force measurement in nanoelectromechanical systems. To perform torque measurement, two atomic force microscope cantilevers are used for simultaneous characterization of axial and radial properties of the same nanostructure. An application related to 3-D imaging is shown in a scanning electron microscope. The ultracompact size makes it possible for DCHNBs to serve as rotary stages for creating 3-D scanning probe microscopes or microgoniometers.
Keywords :
Ge-Si alloys; atomic force microscopy; cantilevers; chirality; elemental semiconductors; nanoelectromechanical devices; scanning electron microscopy; silicon; torque measurement; 3-D imaging; 3-D scanning probe microscopes; Si0.6Ge0.4-Si; atomic force microscope; cantilevers; conversion ratio; dual-chirality helical nanobelts; linear-to-rotary motion converter; microgoniometers; nanoelectromechanical systems; scanning electron microscope; size 10 nm; size 8 nm; three-dimensional microscopy; torque measurement; 3-D scanning probe microscope (SPM); Helical nanobelt (HNB); microgoniometer; motion converter; nanoelectromechanical systems (NEMS);
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2009.2029975
Filename :
5238575
Link To Document :
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