DocumentCode
1369196
Title
Dual-Chirality Helical Nanobelts: Linear-to-Rotary Motion Converters for Three-Dimensional Microscopy
Author
Dong, Lixin ; Zhang, Li ; Kratochvil, Bradley E. ; Shou, Kaiyu ; Nelson, Bradley J.
Author_Institution
Inst. of Robot. & Intell. Syst., ETH Zurich, Zurich, Switzerland
Volume
18
Issue
5
fYear
2009
Firstpage
1047
Lastpage
1053
Abstract
A linear-to-rotary motion converter is demonstrated using 3-D SiGe/Si dual-chirality helical nanobelts (DCHNBs). Analytical and experimental investigation shows that the motion conversion has excellent linearity for small deflections. The conversion ratios of displacement and load for a SiGe/Si DCHNB (an 8-nm-thick Si0.6Ge0.4 and a 10-nm-thick Si layer) are found to be 171.3deg/mum and 2.110 times 10-6 Nmiddotm/N, respectively. The stiffness (0.033 N/m) is much smaller than that of bottom-up synthesized helical nanostructures, which is promising for high-resolution force measurement in nanoelectromechanical systems. To perform torque measurement, two atomic force microscope cantilevers are used for simultaneous characterization of axial and radial properties of the same nanostructure. An application related to 3-D imaging is shown in a scanning electron microscope. The ultracompact size makes it possible for DCHNBs to serve as rotary stages for creating 3-D scanning probe microscopes or microgoniometers.
Keywords
Ge-Si alloys; atomic force microscopy; cantilevers; chirality; elemental semiconductors; nanoelectromechanical devices; scanning electron microscopy; silicon; torque measurement; 3-D imaging; 3-D scanning probe microscopes; Si0.6Ge0.4-Si; atomic force microscope; cantilevers; conversion ratio; dual-chirality helical nanobelts; linear-to-rotary motion converter; microgoniometers; nanoelectromechanical systems; scanning electron microscope; size 10 nm; size 8 nm; three-dimensional microscopy; torque measurement; 3-D scanning probe microscope (SPM); Helical nanobelt (HNB); microgoniometer; motion converter; nanoelectromechanical systems (NEMS);
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2009.2029975
Filename
5238575
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