Large-area, real-time imaging system for surface acoustic wave devices

A system for imaging the particle displacement envelope of vibrational (transverse) modes of surface acoustic wave (SAW) devices is described. The modes are being imaged using a schlieren method for visualizing the acoustic power flow with a beam-expanded helium-neon (HeNe) laser. The optical arrangement uses internal reflection from within the quartz substrate to achieve high-efficiency acousto-optic diffraction of the laser light. The use of a CCD camera coupled with a frame grabber and a computer with image calculator software establishes an imaging system for large-area, real-time visualization, recording, accurate measurement, and analysis of vibrational modes of SAW devices. These methods are part of an effort to determine the relationship between acceleration sensitivity and transverse variations in the acoustic-mode shape in SAW resonators. Use of the system in imaging a 98 MHz SAW device is presented as an example