Development of a Hybrid MEMS BLDC Micromotor

Author

Merzaghi, Sebastiano ; Koechli, Christian ; Perriard, Yves

Author_Institution

Integrated Actuators Lab., Ecole Polytech. Federate de Lausanne, Lausanne, Switzerland

Volume

47

Issue

1

fYear

2011

Firstpage

3

Lastpage

11

Abstract

This paper addresses the design of a new hybrid microelectromechanical systems (MEMS) micromotor. It is a small three-phase axial flux brushless dc (BLDC) motor. The stator is developed following the almost-standard CMOS technology rules used for MEMS manufacturing, and the coils have two copper layers. The rotor is made of a ring permanent magnet assembled over the stator chip. The stator design has been performed using an analytical model also presented in this paper. The microfabrication of the first prototypes is presented, followed by their characterization. With an efficiency of about 42% for an input power of 310 nW, this MEMS micromotor has very good performance and demonstrates the potential of electromagnetic systems at this scale.

Keywords

CMOS integrated circuits; brushless DC motors; micromotors; permanent magnet motors; almost-standard CMOS technology; analytical model; copper layers; electromagnetic systems; hybrid MEMS BLDC micromotor; microelectromechanical systems; microfabrication; power 310 nW; ring permanent magnet; stator chip; three-phase axial flux brushless DC motor; Analytical models; Coils; Computational modeling; Permanent magnet motors; Permanent magnets; Stator windings; Brushless motors; microelectromechanical devices; microelectromechanical systems (MEMS); micromotors; permanent-magnet motors;

fLanguage

English

Journal_Title

Industry Applications, IEEE Transactions on

Publisher

ieee

ISSN

0093-9994

Type

jour

DOI

10.1109/TIA.2010.2090841

Filename

5620972