Title :
Quantum-well Hall devices in Si-delta-doped Al0.25Ga0.75As/GaAs and pseudomorphic Al0.25 Ga0.75As/In0.25Ga0.75As/GaAs heterostructures grown by LP-MOCVD: performance comparisons
Author :
Lee, Jeong-Soo ; Ahn, Kwang-Ho ; Jeong, Yoon-Ha ; Kim, Dae Mann
Author_Institution :
Dept. of Electron. & Electr. Eng., Pohang Univ. of Sci. & Technol., South Korea
fDate :
10/1/1996 12:00:00 AM
Abstract :
Characterized herein are quantum-well Hall devices in Si-delta-doped Al0.25Ga0.75As/GaAs and pseudomorphic Al0.25Ga0.75As/In0.25Ga 0.75As/GaAs heterostructures, grown by low-pressure metal organic chemical vapor deposition method. The Si-delta-doping technique has been applied to quantum-well Hall devices for the first time. As a result high electron mobilities of 8100 cm-2/V·s with a sheet electron density of 1.5×1012 cm-2 in Al0.25Ga0.75As/In0.25Ga0.75 As/GaAs structure and of 6000 cm-2/V·s with the sheet electron density of 1.2×1012 cm-2 in Al0.25Ga0.75As/GaAs structure have been achieved at room temperature, respectively. From Hall devices in Al0.25Ga0.75As/In0.25Ga0.75 As structure, the product sensitivity of 420 V/AT with temperature coefficient of -0.015 %/K has been obtained. This temperature characteristic is one of the best result reported. Additionally, a high signal-to-noise ratio corresponding to the minimum detectable magnetic field of 45 nT at 1 kHz and 75 nT at 100 Hz has been attained. These resolutions are among the best reported results
Keywords :
Hall effect devices; III-V semiconductors; aluminium compounds; chemical vapour deposition; electron density; electron mobility; gallium arsenide; indium compounds; semiconductor doping; semiconductor growth; semiconductor heterojunctions; semiconductor quantum wells; silicon; 1 kHz; 100 Hz; 45 nT; 75 nT; Al0.25Ga0.75As-GaAs:Si; Al0.25Ga0.75As-In0.25Ga0.75 As-GaAs; LP-MOCVD growth; Si-delta-doped Al0.25Ga0.75As/GaAs heterostructure; electron mobility; magnetic field detection; product sensitivity; pseudomorphic Al0.25Ga0.75As/In0.25 Ga0.75As/GaAs heterostructure; quantum-well Hall device; sheet electron density; signal-to-noise ratio; temperature coefficient; Chemical vapor deposition; Electron mobility; Epitaxial growth; Gallium arsenide; Indium phosphide; Molecular beam epitaxial growth; Quantum well devices; Signal to noise ratio; Silicon; Temperature sensors;
Journal_Title :
Electron Devices, IEEE Transactions on