DocumentCode
1370017
Title
Functional devices based on real space transfer in Si/SiGe structure
Author
Mastrapasqua, Marco ; King, Clifford A. ; Smith, P.R. ; Pinto, Mark R.
Author_Institution
Eindhoven Univ. of Technol., Netherlands
Volume
43
Issue
10
fYear
1996
fDate
10/1/1996 12:00:00 AM
Firstpage
1671
Lastpage
1677
Abstract
A charge injection transistor, which operates as an exclusive-OR logic gate, and a monolithic multiterminal device, electrically reprogrammable between OR and NAND logic function, have been successfully implemented in a Si-Si0.7Ge0.3 heterostructure grown by rapid thermal epitaxy on a Si substrate. Room temperature operation of the charge injection transistor is demonstrated, with 10 dB on/off ratio for the exclusive-OR logic function. Microwave measurements indicate a short circuit current gain cutoff of 6 GHz, for a device with a source-drain distance of 0.5 μm. Device simulations were used to identify primary dependencies of the device performance on the parameters used in the design of the structure. Further structural improvements are suggested
Keywords
Ge-Si alloys; charge-coupled devices; elemental semiconductors; hot carriers; logic gates; rapid thermal processing; semiconductor materials; silicon; transistors; vapour phase epitaxial growth; 0.5 micron; 6 GHz; CHINT; NAND logic function; OR logic function; Si; Si substrate; Si-Si0.7Ge0.3; Si/SiGe heterostructure; charge injection transistor; electrically reprogrammable logic function; exclusive-OR logic gate; monolithic multiterminal device; rapid thermal epitaxy; real space transfer; room temperature operation; Epitaxial growth; Germanium silicon alloys; Logic devices; Logic functions; Logic gates; Microwave devices; Microwave transistors; Silicon germanium; Substrates; Temperature;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.536813
Filename
536813
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