• DocumentCode
    1370017
  • Title

    Functional devices based on real space transfer in Si/SiGe structure

  • Author

    Mastrapasqua, Marco ; King, Clifford A. ; Smith, P.R. ; Pinto, Mark R.

  • Author_Institution
    Eindhoven Univ. of Technol., Netherlands
  • Volume
    43
  • Issue
    10
  • fYear
    1996
  • fDate
    10/1/1996 12:00:00 AM
  • Firstpage
    1671
  • Lastpage
    1677
  • Abstract
    A charge injection transistor, which operates as an exclusive-OR logic gate, and a monolithic multiterminal device, electrically reprogrammable between OR and NAND logic function, have been successfully implemented in a Si-Si0.7Ge0.3 heterostructure grown by rapid thermal epitaxy on a Si substrate. Room temperature operation of the charge injection transistor is demonstrated, with 10 dB on/off ratio for the exclusive-OR logic function. Microwave measurements indicate a short circuit current gain cutoff of 6 GHz, for a device with a source-drain distance of 0.5 μm. Device simulations were used to identify primary dependencies of the device performance on the parameters used in the design of the structure. Further structural improvements are suggested
  • Keywords
    Ge-Si alloys; charge-coupled devices; elemental semiconductors; hot carriers; logic gates; rapid thermal processing; semiconductor materials; silicon; transistors; vapour phase epitaxial growth; 0.5 micron; 6 GHz; CHINT; NAND logic function; OR logic function; Si; Si substrate; Si-Si0.7Ge0.3; Si/SiGe heterostructure; charge injection transistor; electrically reprogrammable logic function; exclusive-OR logic gate; monolithic multiterminal device; rapid thermal epitaxy; real space transfer; room temperature operation; Epitaxial growth; Germanium silicon alloys; Logic devices; Logic functions; Logic gates; Microwave devices; Microwave transistors; Silicon germanium; Substrates; Temperature;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/16.536813
  • Filename
    536813