DocumentCode :
1370017
Title :
Functional devices based on real space transfer in Si/SiGe structure
Author :
Mastrapasqua, Marco ; King, Clifford A. ; Smith, P.R. ; Pinto, Mark R.
Author_Institution :
Eindhoven Univ. of Technol., Netherlands
Volume :
43
Issue :
10
fYear :
1996
fDate :
10/1/1996 12:00:00 AM
Firstpage :
1671
Lastpage :
1677
Abstract :
A charge injection transistor, which operates as an exclusive-OR logic gate, and a monolithic multiterminal device, electrically reprogrammable between OR and NAND logic function, have been successfully implemented in a Si-Si0.7Ge0.3 heterostructure grown by rapid thermal epitaxy on a Si substrate. Room temperature operation of the charge injection transistor is demonstrated, with 10 dB on/off ratio for the exclusive-OR logic function. Microwave measurements indicate a short circuit current gain cutoff of 6 GHz, for a device with a source-drain distance of 0.5 μm. Device simulations were used to identify primary dependencies of the device performance on the parameters used in the design of the structure. Further structural improvements are suggested
Keywords :
Ge-Si alloys; charge-coupled devices; elemental semiconductors; hot carriers; logic gates; rapid thermal processing; semiconductor materials; silicon; transistors; vapour phase epitaxial growth; 0.5 micron; 6 GHz; CHINT; NAND logic function; OR logic function; Si; Si substrate; Si-Si0.7Ge0.3; Si/SiGe heterostructure; charge injection transistor; electrically reprogrammable logic function; exclusive-OR logic gate; monolithic multiterminal device; rapid thermal epitaxy; real space transfer; room temperature operation; Epitaxial growth; Germanium silicon alloys; Logic devices; Logic functions; Logic gates; Microwave devices; Microwave transistors; Silicon germanium; Substrates; Temperature;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/16.536813
Filename :
536813
Link To Document :
بازگشت