Title :
A Bayesian Approach to Diameter Estimation in the Diameter Control System of Silicon Single Crystal Growth
Author :
Liu, Ding ; Liang, Junli
Author_Institution :
Sch. of Autom. & Inf. Eng., Xi´´an Univ. of Technol., Xi´´an, China
fDate :
4/1/2011 12:00:00 AM
Abstract :
In the diameter control system of silicon single crystal growth, the variation of the diameter of the aperture (i.e., a halo with high brightness, which appears at the junction of a solid crystal and a liquid solution) is consistent with the change in the diameter of the growing crystal. Therefore, the diameter of the aperture can be used as a control variable for adjusting the casting speed and temperature so that the grown silicon single crystal approximates to a perfect cylinder. It is obvious that the measured diameter of the current aperture plays an important role in the diameter control system of silicon single crystal growth. In fact, the obtained aperture image from a charge-coupled device camera is a halo of ellipses instead of circles. To estimate the diameter (or radius) of the elliptical aperture, we propose a Bayesian approach, in which a Bayesian model is derived to define a posterior distribution for the unknown parameters. This distribution is too complicated for analytical extraction of moments to sample directly. An efficient computational algorithm based on a Markov chain Monte Carlo method is derived to estimate the posterior distribution and draw samples from the distribution. Comparing with the classical Hough transform-based algorithm and the direct least-squares fitting method, the proposed algorithm has higher estimation accuracy. Some simulated and experimental examples are presented to illustrate the algorithm´s effectiveness.
Keywords :
Hough transforms; Markov processes; Monte Carlo methods; belief networks; casting; charge-coupled devices; crystal growth; curve fitting; diameter measurement; elemental semiconductors; least squares approximations; semiconductor device manufacture; semiconductor growth; temperature control; velocity control; Bayesian model; Hough transform-based algorithm; Markov chain Monte Carlo method; Si; casting speed; charge-coupled device camera; diameter control system; diameter estimation; direct least-squares fitting method; ellipses; elliptical aperture; halo; liquid solution; posterior distribution; silicon single crystal growth; solid crystal; Bayesian inference; diameter estimation; ellipse fitting; growth control; silicon single crystal;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
DOI :
10.1109/TIM.2010.2086610