DocumentCode :
1370748
Title :
Nanoscale Transfer of Energy and Matter in Plasma–Surface Interactions
Author :
Ostrikov, Kostya Ken
Author_Institution :
Plasma Nanosci. Center Australia, CSIRO Mater. Sci. & Eng., Lindfield, NSW, Australia
Volume :
39
Issue :
4
fYear :
2011
fDate :
4/1/2011 12:00:00 AM
Firstpage :
963
Lastpage :
970
Abstract :
The main issues related to control of energy and matter in hierarchical low-temperature plasma-solid systems used in nanoscale synthesis and processing are critically examined. A conceptual approach to identify the most effective carriers and transport mechanisms of energy and matter at the nano- and subnanometer scales in plasma-aided nanofabrication is proposed. This approach is highly relevant to the envisaged energy- and matter-efficient plasma-based production of the next-generation advanced nanomaterials for applications in the energy, environment, food, water, health, and security technologies critically needed for a sustainable future.
Keywords :
nanofabrication; nanostructured materials; plasma materials processing; plasma-wall interactions; energy-efficient plasma-based production; hierarchical low-temperature plasma-solid systems; matter-efficient plasma-based production; nanoscale energy transfer; nanoscale matter transfer; nanoscale processing; nanoscale synthesis; next-generation advanced nanomaterials; plasma-aided nanofabrication; plasma-surface interactions; Carbon; Heating; Nanoscale devices; Plasmas; Substrates; Surface morphology; Surface treatment; Control of energy and matter; low-temperature plasma; nanofabrication; nanostructures; plasma nanoscience;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/TPS.2010.2085020
Filename :
5621925
Link To Document :
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