Title :
Modeling of surface acoustic wave strain sensors using coupling-of-modes analysis
Author :
Cormack, Brian Mc ; Geraghty, Dermot ; O´Mahony, Margaret
Author_Institution :
Dept. of Mech. & Manuf. Eng., Trinity Coll., Dublin, Ireland
fDate :
11/1/2011 12:00:00 AM
Abstract :
SAW devices may be configured as strain sensors, providing passive, wireless strain measurement in demanding conditions. A key consideration is the modeling of the sensors, enabling different device designs to be considered. This paper presents a simulation scheme using coupling-of-modes (COM) analysis which allows both the frequency response of a SAW strain sensor and its bias sensitivity to be evaluated. Example applications are presented to demonstrate the use of the model.
Keywords :
frequency response; sensitivity; strain measurement; strain sensors; surface acoustic wave sensors; COM analysis; SAW devices; coupling-of-modes analysis; frequency response; sensitivity; surface acoustic wave strain sensors; wireless strain measurement; Analytical models; Electrodes; Sensitivity; Sensors; Strain; Stress; Substrates; Acoustics; Computer Simulation; Computer-Aided Design; Elastic Modulus; Elasticity Imaging Techniques; Equipment Design; Equipment Failure Analysis; Materials Testing; Models, Theoretical; Scattering, Radiation; Transducers;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2011.2102