Title :
Determination of mass density, dielectric, elastic, and piezoelectric constants of bulk GaN crystal
Author :
Soluch, Waldemar ; Brzozowski, Ernest ; Lysakowska, Magdalena ; Sadura, Jolanta
Author_Institution :
Inst. of Electron. Mater. Technol., Warsaw, Poland
fDate :
11/1/2011 12:00:00 AM
Abstract :
Mass density, dielectric, elastic, and piezoelectric constants of bulk GaN crystal were determined. Mass density was obtained from the measured ratio of mass to volume of a cuboid. The dielectric constants were determined from the measured capacitances of an interdigital transducer (IDT) deposited on a Z-cut plate and from a parallel plate capacitor fabricated from this plate. The elastic and piezoelectric constants were determined by comparing the measured and calculated SAW velocities and electromechanical coupling coefficients on the Z- and X-cut plates. The following new constants were obtained: mass density p = 5986 kg/m3; relative dielectric constants (at constant strain S) ε11S/ε0 = 8.6 and ε11S/ε0 = 10.5, where ε0 is a dielectric constant of free space; elastic constants (at constant electric field E) C11E = 349.7, C12E = 128.1, C13E = 129.4, C33E = 430.3, and C44E = 96.5 GPa; and piezoelectric constants e33 = 0.84, e31 = -0.47, and e15 = -0.41 C/m2.
Keywords :
III-V semiconductors; density; elastic constants; elasticity; gallium compounds; permittivity; piezoelectricity; wide band gap semiconductors; GaN; SAW velocity; Z-cut plate capacitor; bulk crystal; dielectric constants; elastic constants; electromechanical coupling coefficients; interdigital transducer capacitances; mass density; piezoelectric constants; Couplings; Crystals; Delay lines; Dielectric constant; Dielectric measurements; Gallium nitride; Velocity measurement; Computer Simulation; Crystallization; Densitometry; Elastic Modulus; Electric Impedance; Gallium; Materials Testing; Models, Chemical; Vibration;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2011.2103