Characterization of thin film microstrip lines on polyimide

Author

Ponchak, George E. ; Downey, Alan N.

Author_Institution

NASA Lewis Res. Center, Cleveland, OH, USA

Volume

21

Issue

2

fYear

1998

fDate

5/1/1998 12:00:00 AM

Firstpage

171

Lastpage

176

Abstract

This paper presents an in depth characterization of thin film microstrip (TFMS) lines fabricated on Dupont PI-2611 polyimide. Measured attenuation and effective dielectric constant is presented for TFMS lines with thicknesses from 2.45-7.4 μm and line widths from 5-34.4 μm over the frequency range of 1-110 GHz. The attenuation is separated into conductor and dielectric losses to determine the loss tangent of Dupont PI-2611 polyimide over the microwave frequency range. In addition, the measured characteristics are compared to closed form equations for α and ε_eff from the literature. Based on the comparisons, recommendations for the best closed form design equations for TFMS are made

Keywords

MIMIC; MMIC; dielectric losses; integrated circuit measurement; microstrip circuits; microstrip lines; permittivity; polymer films; 1 to 110 GHz; 2.45 to 7.4 micron; 5 to 34.4 micron; Dupont PI-2611 polyimide; attenuation; closed form design equations; conductor losses; dielectric losses; effective dielectric constant; loss tangent; microwave frequency range; thin film microstrip lines; Attenuation measurement; Dielectric losses; Dielectric measurements; Dielectric thin films; Equations; Frequency measurement; Microstrip; Polyimides; Thickness measurement; Transistors;

fLanguage

English

Journal_Title

Components, Packaging, and Manufacturing Technology, Part B: Advanced Packaging, IEEE Transactions on

Publisher

ieee

ISSN

1070-9894

Type

jour

DOI

10.1109/96.673705

Filename

673705