DocumentCode
13712
Title
Improved Technique for Quantifying the Bias-Dependent Mobility of Metal-Oxide Thin-Film Transistors
Author
Zeumault, Andre ; Subramanian, Vivek
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., Univ. of California at Berkeley, Berkeley, CA, USA
Volume
62
Issue
3
fYear
2015
fDate
Mar-15
Firstpage
855
Lastpage
861
Abstract
In this paper, we build upon existing techniques to provide a self-consistent, physically based method particularly well suited for quantifying the mobility of solution-processed transition metal-oxide-based thin-film transistors (TFTs). The methodology is presented as a more appropriate alternative to existing square-law techniques whose assumptions are inapplicable to systems exhibiting dispersive transport. To demonstrate its utility in solution-processed electronics, this method was applied to solution-processed SnO2 and ZnO TFTs having various gate dielectrics. In addition, to account for the different operating voltages set by the differences in effective oxide thickness of the dielectric, mobility was evaluated as a function of the transverse electric field, allowing for the direct comparison of mobility independent of the choice of gate dielectric.
Keywords
II-VI semiconductors; electron mobility; thin film transistors; tin compounds; wide band gap semiconductors; zinc compounds; SnO2; ZnO; dielectric oxide thickness; field effect mobility; gate dielectrics; solution-processed electronics; solution-processed transition metal-oxide-based TFTs; square-law techniques; thin-film transistors; transverse electric field; Capacitance; Capacitance measurement; Current measurement; Dielectrics; Logic gates; Mathematical model; Semiconductor device measurement; Conductive oxides; dispersive transport; electrical modeling; field effect mobility; transverse field; transverse field.;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/TED.2014.2386347
Filename
7006730
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