Title :
Suspended optical waveguide with in-plane degree of freedom for microelectromechanical applications
Author_Institution :
Fac. of Eng., Tel Aviv Univ., Israel
fDate :
4/2/1998 12:00:00 AM
Abstract :
A suspended optical waveguide displacement sensor (SOWDS) based on single crystal silicon beams with an inherent in-plane degree of freedom is presented. The SOWDS technology is based on the single crystal silicon reactive ion etching and metallisation (SCREAM) process, and opens new methods of monolithically integrating optical manipulation with SCREAM based sensors and actuators
Keywords :
displacement measurement; elemental semiconductors; micromechanical devices; optical planar waveguides; silicon; sputter etching; SCREAM; SOWDS; Si; displacement sensor; in-plane degree of freedom; metallisation; microelectromechanical applications; optical manipulation; reactive ion etching; suspended optical waveguide;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19980500
