DocumentCode :
1372162
Title :
Design and Fabrication of Tb 
-Doped Silicon Oxy-Nitride Microdisk for Biosensor Applications
Author :
Jeong, Hoon ; Lee, Shinyoung ; Sung, Gun Yong ; Shin, Jung H.
Author_Institution :
Dept. of Phys., KAIST, Daejeon, South Korea
Volume :
23
Issue :
2
fYear :
2011
Firstpage :
88
Lastpage :
90
Abstract :
We report on fabricating Tb-doped SiON microdisks on a Si chip for low-cost all-Si biosensor applications. The 120-nm-thin 10-μm diameter pedestal-type microdisks were designed and fabricated for optimum biosensing capabilities. Whispering gallery modes of fabricated microdisks were measured via UV top pumping and side-photoluminescence (PL) measurement, and Q-factors of several hundreds were obtained. Using the microdisk resonators to sense streptavidin using biotin functionalization is also demonstrated.
Keywords :
Q-factor; biosensors; integrated optics; microdisc lasers; silicon compounds; terbium; whispering gallery modes; Q-factor; SiON:Tb; UV top pumping; biosensors; biotin functionalization; microdisk resonators; pedestal-type microdisks; side-photoluminescence measurement; size 10 mum; size 120 nm; whispering gallery modes; Biosensors; Microcavities; Optical device fabrication; Optical films; Optical sensors; Silicon; Biosensors; microresonators; rare-earth doping;
fLanguage :
English
Journal_Title :
Photonics Technology Letters, IEEE
Publisher :
ieee
ISSN :
1041-1135
Type :
jour
DOI :
10.1109/LPT.2010.2091268
Filename :
5624567
Link To Document :
