• DocumentCode
    1372162
  • Title

    Design and Fabrication of Tb ^{3+} -Doped Silicon Oxy-Nitride Microdisk for Biosensor Applications

  • Author

    Jeong, Hoon ; Lee, Shinyoung ; Sung, Gun Yong ; Shin, Jung H.

  • Author_Institution
    Dept. of Phys., KAIST, Daejeon, South Korea
  • Volume
    23
  • Issue
    2
  • fYear
    2011
  • Firstpage
    88
  • Lastpage
    90
  • Abstract
    We report on fabricating Tb-doped SiON microdisks on a Si chip for low-cost all-Si biosensor applications. The 120-nm-thin 10-μm diameter pedestal-type microdisks were designed and fabricated for optimum biosensing capabilities. Whispering gallery modes of fabricated microdisks were measured via UV top pumping and side-photoluminescence (PL) measurement, and Q-factors of several hundreds were obtained. Using the microdisk resonators to sense streptavidin using biotin functionalization is also demonstrated.
  • Keywords
    Q-factor; biosensors; integrated optics; microdisc lasers; silicon compounds; terbium; whispering gallery modes; Q-factor; SiON:Tb; UV top pumping; biosensors; biotin functionalization; microdisk resonators; pedestal-type microdisks; side-photoluminescence measurement; size 10 mum; size 120 nm; whispering gallery modes; Biosensors; Microcavities; Optical device fabrication; Optical films; Optical sensors; Silicon; Biosensors; microresonators; rare-earth doping;
  • fLanguage
    English
  • Journal_Title
    Photonics Technology Letters, IEEE
  • Publisher
    ieee
  • ISSN
    1041-1135
  • Type

    jour

  • DOI
    10.1109/LPT.2010.2091268
  • Filename
    5624567
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1372162