On the accuracy and efficiency of substrate current calculations for sub-μm n-MOSFET´s

The accuracy and efficiency of the self-consistent (regarding the electric field) Monte Carlo model, nonself-consistent Monte Carlo model, and the soft-threshold lucky electron model (LEM) for the calculation of substrate currents in deep sub-μm n-MOSFET´s are investigated. While the two Monte Carlo models are in good agreement with the experiment, the simpler LEM model still gives reasonable results even for a 0.16 μm n-MOSFET. On the other hand, huge differences in the CPU time consumption are found and the LEM is about four orders of magnitude faster than the self-consistent Monte Carlo simulations. The nonself-consistent calculations are only one order of magnitude slower than the LEM. The good agreement with the experiment is obtained without considering the so-called surface impact ionization or any fitting of parameters on the device level.