Title :
A statistical algorithm for 3D capacitance extraction
Author :
Brambilla, Angelo ; Maffezzoni, Paolo
Author_Institution :
Dipt. di Elettronica e Inf., Politecnico di Milano, Italy
fDate :
8/1/2000 12:00:00 AM
Abstract :
This letter deals with the problem of parasitic capacitance extraction in deep suhmicron layouts having general geometries. The presented extraction method is based on the statistical floating random walk algorithm. It employs a suitable spherical Green´s function that, in a charge free region, relates the electrical field in the sphere center to the surface electrical potential
Keywords :
Green´s function methods; ULSI; capacitance; integrated circuit interconnections; integrated circuit layout; integrated circuit modelling; statistical analysis; 3D capacitance extraction; charge free region; deep submicron layouts; electrical field; parasitic capacitance extraction; spherical Green´s function; statistical algorithm; statistical floating random walk algorithm; surface electrical potential; Azimuth; Electric potential; Geometry; Green function; Integrated circuit interconnections; Integrated circuit measurements; Laplace equations; Parasitic capacitance; Polynomials; Ultra large scale integration;
Journal_Title :
Microwave and Guided Wave Letters, IEEE
