DocumentCode
1373255
Title
A statistical algorithm for 3D capacitance extraction
Author
Brambilla, Angelo ; Maffezzoni, Paolo
Author_Institution
Dipt. di Elettronica e Inf., Politecnico di Milano, Italy
Volume
10
Issue
8
fYear
2000
fDate
8/1/2000 12:00:00 AM
Firstpage
304
Lastpage
306
Abstract
This letter deals with the problem of parasitic capacitance extraction in deep suhmicron layouts having general geometries. The presented extraction method is based on the statistical floating random walk algorithm. It employs a suitable spherical Green´s function that, in a charge free region, relates the electrical field in the sphere center to the surface electrical potential
Keywords
Green´s function methods; ULSI; capacitance; integrated circuit interconnections; integrated circuit layout; integrated circuit modelling; statistical analysis; 3D capacitance extraction; charge free region; deep submicron layouts; electrical field; parasitic capacitance extraction; spherical Green´s function; statistical algorithm; statistical floating random walk algorithm; surface electrical potential; Azimuth; Electric potential; Geometry; Green function; Integrated circuit interconnections; Integrated circuit measurements; Laplace equations; Parasitic capacitance; Polynomials; Ultra large scale integration;
fLanguage
English
Journal_Title
Microwave and Guided Wave Letters, IEEE
Publisher
ieee
ISSN
1051-8207
Type
jour
DOI
10.1109/75.862222
Filename
862222
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