Title :
Electron beam sampling of IC-internal GHz signals
Author :
Schmitt, Renata ; Winkler, Dietmar ; Brunner, Michael ; Lischke, B.
Author_Institution :
Siemens Res. Labs., Munich
fDate :
2/18/1988 12:00:00 AM
Abstract :
An electron beam test system has been developed which allows internal waveform measurements on integrated circuits operating with GHz frequencies. Internal signals of a 7 GHz frequency divider have been recorded. The e-beam system produces 15 ps electron pulses which allow rise time measurements down to 30 ps with less than 10% error and delay measurements below 5 ps
Keywords :
digital integrated circuits; electron beam applications; integrated circuit testing; test equipment; 5 to 30 ps; IC-internal GHz signals; delay measurements; digital circuits; electron beam test system; electron pulses; integrated circuits; internal waveform measurements; rise time measurements;
Journal_Title :
Electronics Letters
