A Miniature Distributed Ku-Band Phase Shifter Using Tunable Inductors and MEMS Varactors

This work reports on a miniature distributed micro electro mechanical system (MEMS) phase shifter using both tunable capacitors and inductors. Compared to the conventional distributed MEMS phase shifters with only tunable capacitors, the proposed MEMS phase shifter has one more design parameter (tunable inductor value) to realize high return loss of more than 26 dB at all states, large phase shift of 37.5°/mm per unit length, and large phase shift per decibel of 180°/dB at 15 GHz. A one proof-of-concept 1 bit phase shifter is fabricated and characterized. The measured results of the phase shifter are in good agreement with measurements.