Numerical analysis of near-infrared wave propagation characteristics in dielectric-coated parallel planar microstructural waveguides

Author

Van Petegem, Wim E A ; James, C. Robert ; Vermeulen, Fred E. ; Robinson, Alexander M.

Volume

45

Issue

3

fYear

1997

fDate

3/1/1997 12:00:00 AM

Firstpage

367

Lastpage

375

Abstract

In this paper, the properties of electromagnetic (EM) wave propagation in layered planar microstructural waveguides are investigated. Analytical and numerical results are presented on the propagation of a 1-μm EM wave in a parallel planar waveguide. Its walls are made of Au or Si, coated with a thin layer of SiO₂ and separated by a fluid. The propagation characteristics of even and odd TE and TM modes are described as a function of the coating thickness. It is shown that the propagation of TE modes exhibits a sudden shift in power flow distribution from the fluid to the coating when the coating thickness exceeds a critical value. This property may be exploited for micromachined sensor applications. TM modes do not exhibit this behaviour

Keywords

coplanar waveguides; microsensors; submillimetre wave propagation; waveguide theory; 1 micrometre; Au-SiO₂; Si-SiO₂; TE modes; TM modes; coating thickness; coplanar waveguides; dielectric-coated parallel planar microstructural waveguides; micromachined sensor applications; near-infrared wave propagation characteristics; power flow distribution; propagation characteristics; submillimeter wave propagation; Coatings; Dielectrics; Electromagnetic propagation; Electromagnetic waveguides; Gold; Numerical analysis; Optical waveguides; Planar waveguides; Silicon; Tellurium;

fLanguage

English

Journal_Title

Microwave Theory and Techniques, IEEE Transactions on

Publisher

ieee

ISSN

0018-9480

Type

jour

DOI

10.1109/22.563335

Filename

563335