DocumentCode
1377537
Title
AlN/GaN insulated gate heterostructure FET with regrown n+ GaN ohmic contact
Author
Kawai, H. ; Hara, M. ; Nakamura, F. ; Imanaga, S.
Author_Institution
Res. Center, Sony Corp., Yokohama, Japan
Volume
34
Issue
6
fYear
1998
fDate
3/19/1998 12:00:00 AM
Firstpage
592
Lastpage
593
Abstract
An AlN/GaN insulated gate heterostructure FET is presented. An n +GaN channel is placed on a thick Al0.15Ga0.85N layer and is covered by a 4 nm thick AlN insulator layer. The FET has a threshold voltage of near 0 V. A G m of 220 mS/mm for a 1.4 μm gate length was obtained
Keywords
III-V semiconductors; MISFET; aluminium compounds; gallium compounds; ohmic contacts; 1.4 micron; 4 nm; AlN-GaN; gate length; insulated gate heterostructure FET; regrown ohmic contact; threshold voltage;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19980464
Filename
674308
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