Abstract :
A hybrid technology, which combines silicon MEMS and superconductor thin films, shows promise for tunable high-performance microwave circuits. Doped silicon has potential as a good low-loss dielectric material at cryogenic temperatures for device applications in frequency tuning and reconfiguration, UK-based researchers have shown. A team from the University of Birmingham demonstrated how their micromachined silicon rocking actuator can be used to tune a high temperature superconducting resonator without significantly affecting its Q factor.
Keywords :
Q-factor; circuit tuning; dielectric materials; elemental semiconductors; microactuators; micromachining; microwave circuits; semiconductor doping; silicon; superconducting resonators; superconducting thin films; Q factor; cryogenic temperature; device application; doped silicon; frequency reconfiguration; frequency tuning; high temperature superconducting resonator; hybrid technology; low-loss dielectric material; micromachined silicon rocking actuator; silicon MEMS; superconductor thin film; tunable high-performance microwave circuit;
