DocumentCode
1378659
Title
Cryogenic performance of micromachined silicon rocking actuator for tuning a uperconducting resonator
Author
Wang, Yannan ; Prest, M.J. ; Lancaster, Michael J.
Author_Institution
Sch. of Electron., Electr. & Comput. Eng., Univ. of Birmingham, Birmingham, UK
Volume
46
Issue
23
fYear
2010
Firstpage
1569
Lastpage
1571
Abstract
A micromachined silicon rocking actuator is used to tune a high temperature superconducting resonator. Its performance at cryogenic temperatures from 77 to 30 K is studied. A significant increase in the quality factor of the resonator, from 376 to 13876, is observed. It is confirmed that the change in resistance of the silicon tuning probe with temperature is the main factor responsible for the improvement. At low temperature, the silicon becomes an excellent dielectric, which makes it a good material for low-loss tuners.
Keywords
cryogenic electronics; dielectric losses; electric resistance; elemental semiconductors; high-temperature superconductors; microactuators; micromachining; silicon; superconducting resonators; Si; cryogenic temperatures; dielectric material; electric resistance; high temperature superconducting resonator; low-loss tuners; micromachined silicon rocking actuator; quality factor; silicon tuning probe; temperature 77 K to 30 K;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el.2010.8454
Filename
5635410
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