Title :
Optimisation of empirical model for IC fabrication process using linear programming
Author :
Sprevak, D. ; Ferguson, R.S. ; Walton, A.J. ; Newsam, M.I.
Author_Institution :
Dept. of Stat. & Oper. Res., Queen´´s Univ., Belfast, UK
fDate :
3/1/1998 12:00:00 AM
Abstract :
A procedure for selecting alternative sets of optimal parameters for an NMOS semiconductor device manufacturing process is presented. An optimisation strategy is discussed which leads to the calculation of process parameters for devices that attain the designed characteristics while having the process parameters set at their most desirable values
Keywords :
integrated circuit technology; IC fabrication; NMOS semiconductor device; empirical model; linear programming; manufacturing process; optimal parameters; optimisation;
Journal_Title :
Science, Measurement and Technology, IEE Proceedings -
DOI :
10.1049/ip-smt:19981810
