Title :
Silicon X-Ray Detector With Integrated Thin-Film Transistor for Biomedical Applications
Author :
Wang, Kai ; Karim, Karim S.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Waterloo, Waterloo, ON, Canada
Abstract :
A novel silicon X-ray detector with an integrated thin-film-transistor (TFT) readout circuit is presented. The device consists of a bulk-silicon photodiode and a TFT atop the photodiode. X-ray photons are absorbed and converted to electronic charges by the bulk-silicon photodiode and then read out via the modulation of the TFT drain-source current through an internal gate. Such a device is promising for low-energy X-ray or gamma-ray applications including protein crystallography and X-ray spectroscopy.
Keywords :
X-ray detection; biomedical electronics; elemental semiconductors; photodetectors; photodiodes; readout electronics; silicon; thin film transistors; Si; TFT drain-source current; TFT readout circuit; X-ray photons; X-ray spectroscopy; biomedical applications; bulk-silicon photodiode; electronic charges; gamma-ray application; integrated thin-film transistor; low-energy X-ray application; protein crystallography; silicon X-ray detector; Silicon radiation detector; X-ray detector; thin-film transistor (TFT);
Journal_Title :
Electron Device Letters, IEEE
DOI :
10.1109/LED.2009.2036452
