Title :
On-wafer calibration of a double six-port reflectometer including constants for absolute power measurements
Author :
Berghoff, Gerald ; Bergeault, Eric ; Huyart, Bernard ; Jallet, Louis
Author_Institution :
Dept. COM, ENST, Paris, France
fDate :
10/1/1997 12:00:00 AM
Abstract :
The complete calibration of a double six-port network analyzer includes constants for the measurement of wave ratios (S-parameters) as well as constants for absolute power level measurements for nonlinear device characterization. This paper describes how a complete set of constants can be obtained for on-wafer measurements from a complete calibration in a coaxial measurement plane and a subsequent on-wafer calibration with the minimum number of elements
Keywords :
S-parameters; calibration; microwave reflectometry; network analysers; power measurement; S-parameters; absolute power measurements; coaxial measurement plane; double six-port reflectometer; nonlinear device characterization; on-wafer calibration; wave ratios; Calibration; Coaxial cables; Coaxial components; Connectors; Level measurement; Power measurement; Probes; Scattering parameters; Semiconductor device modeling; Sensor phenomena and characterization;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
