DocumentCode
1380578
Title
On-wafer calibration of a double six-port reflectometer including constants for absolute power measurements
Author
Berghoff, Gerald ; Bergeault, Eric ; Huyart, Bernard ; Jallet, Louis
Author_Institution
Dept. COM, ENST, Paris, France
Volume
46
Issue
5
fYear
1997
fDate
10/1/1997 12:00:00 AM
Firstpage
1111
Lastpage
1114
Abstract
The complete calibration of a double six-port network analyzer includes constants for the measurement of wave ratios (S-parameters) as well as constants for absolute power level measurements for nonlinear device characterization. This paper describes how a complete set of constants can be obtained for on-wafer measurements from a complete calibration in a coaxial measurement plane and a subsequent on-wafer calibration with the minimum number of elements
Keywords
S-parameters; calibration; microwave reflectometry; network analysers; power measurement; S-parameters; absolute power measurements; coaxial measurement plane; double six-port reflectometer; nonlinear device characterization; on-wafer calibration; wave ratios; Calibration; Coaxial cables; Coaxial components; Connectors; Level measurement; Power measurement; Probes; Scattering parameters; Semiconductor device modeling; Sensor phenomena and characterization;
fLanguage
English
Journal_Title
Instrumentation and Measurement, IEEE Transactions on
Publisher
ieee
ISSN
0018-9456
Type
jour
DOI
10.1109/19.676722
Filename
676722
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