Title :
Scaling of piezoelectric properties in nanometre to micrometre scale
Author :
Durkan, C. ; Welland, M.E. ; Chu, D.P. ; Migliorato, P.
Author_Institution :
Dept. of Eng., Cambridge Univ., UK
Abstract :
Measurements of piezoelectric response have been performed using atomic force microscopy (AFM) on sol-gel produced lead-zirconate-titanate (PZT) thin films, upon which nanometre- to micrometre-scale electrodes have been patterned. It is found that the magnitude of the piezoelectric response as a function of the electrode size in the range from a few nanometres up to 6 /spl mu/m can be described accurately in terms of the fringing of the electric field around the electrode edges.
Keywords :
ferroelectric thin films; PZT; PbZrO3TiO3; atomic force microscopy; electric field; electrode size; ferroelectric thin films; fringing; micrometre-scale electrodes; nanometre-scale electrodes; piezoelectric properties; sol-gel process;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20000291
