DocumentCode
1380808
Title
Hybrid polyimide/Ta2O5/polyimide antiresonant reflecting optical waveguides
Author
Chu, A.K. ; Lee, K.M. ; Pong, B.J. ; Lin, C.J. ; Ho, W.-J. ; Shih, T.T.
Author_Institution
Integrated Optolectron., Nat. Sun Yat-Sen Univ., Kaohsiung, Taiwan
Volume
36
Issue
18
fYear
2000
fDate
8/31/2000 12:00:00 AM
Firstpage
1539
Lastpage
1540
Abstract
A hybrid polyimide/Ta2O5/polyimide antiresonant reflecting optical waveguide (ARROW) is presented. The ARROW consists of fluorinated polyimide and tantalum pentoxide hybrid layers deposited on Si substrates. The propagation losses of the device are 0.6 and 2.6 dB/cm at 1.3 μm for TE and TM polarised lights, respectively
Keywords
light polarisation; light reflection; optical fabrication; optical films; optical losses; optical materials; optical planar waveguides; optical polymers; polymer films; ridge waveguides; tantalum compounds; 1.3 mum; ARROW; Si; Si substrates; TE polarised light; TM polarised light; Ta2O5; antiresonant reflecting optical waveguide; fluorinated polyimide; hybrid layers; hybrid polyimide/Ta2O5/polyimide antiresonant reflecting optical waveguides; propagation losses;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20001096
Filename
868098
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