• DocumentCode
    1380808
  • Title

    Hybrid polyimide/Ta2O5/polyimide antiresonant reflecting optical waveguides

  • Author

    Chu, A.K. ; Lee, K.M. ; Pong, B.J. ; Lin, C.J. ; Ho, W.-J. ; Shih, T.T.

  • Author_Institution
    Integrated Optolectron., Nat. Sun Yat-Sen Univ., Kaohsiung, Taiwan
  • Volume
    36
  • Issue
    18
  • fYear
    2000
  • fDate
    8/31/2000 12:00:00 AM
  • Firstpage
    1539
  • Lastpage
    1540
  • Abstract
    A hybrid polyimide/Ta2O5/polyimide antiresonant reflecting optical waveguide (ARROW) is presented. The ARROW consists of fluorinated polyimide and tantalum pentoxide hybrid layers deposited on Si substrates. The propagation losses of the device are 0.6 and 2.6 dB/cm at 1.3 μm for TE and TM polarised lights, respectively
  • Keywords
    light polarisation; light reflection; optical fabrication; optical films; optical losses; optical materials; optical planar waveguides; optical polymers; polymer films; ridge waveguides; tantalum compounds; 1.3 mum; ARROW; Si; Si substrates; TE polarised light; TM polarised light; Ta2O5; antiresonant reflecting optical waveguide; fluorinated polyimide; hybrid layers; hybrid polyimide/Ta2O5/polyimide antiresonant reflecting optical waveguides; propagation losses;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20001096
  • Filename
    868098