• DocumentCode
    1380978
  • Title

    Demonstration of PECVD SiC–SiO _{2} –SiC Horizontal Slot Waveguides

  • Author

    Pandraud, G. ; Neira, A. Barbosa ; Margallo-Balbas, E. ; Yang, C.K. ; Sarro, P.M.

  • Author_Institution
    Lab. of Electron. Components, Mater. & Technol., Delft Univ. of Technol., Delft, Netherlands
  • Volume
    22
  • Issue
    6
  • fYear
    2010
  • fDate
    3/15/2010 12:00:00 AM
  • Firstpage
    398
  • Lastpage
    400
  • Abstract
    We report on the first demonstration of guiding light in horizontal slot-waveguides using a plasma-enhanced chemical vapor deposition silicon carbide (SiC)-silicon oxide (SiO2)-SiC structure. Propagation losses of 23.9 ??1.2 dB/cm have been measured for the quasi-transverse-magnetic mode of the fabricated slot waveguides at 1.3 ??m .
  • Keywords
    integrated optics; optical losses; optical waveguides; plasma CVD; silicon compounds; wide band gap semiconductors; SiC-SiO2-SiC; horizontal slot waveguides; integrated optics; plasma-enhanced chemical vapor deposition; propagation loss; quasi-transverse-magnetic mode; wavelength 1.3 mum; Integrated optics; optical waveguides;
  • fLanguage
    English
  • Journal_Title
    Photonics Technology Letters, IEEE
  • Publisher
    ieee
  • ISSN
    1041-1135
  • Type

    jour

  • DOI
    10.1109/LPT.2009.2039933
  • Filename
    5378641
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1380978