DocumentCode :
1380978
Title :
Demonstration of PECVD SiC–SiO 
–SiC Horizontal Slot Waveguides
Author :
Pandraud, G. ; Neira, A. Barbosa ; Margallo-Balbas, E. ; Yang, C.K. ; Sarro, P.M.
Author_Institution :
Lab. of Electron. Components, Mater. & Technol., Delft Univ. of Technol., Delft, Netherlands
Volume :
22
Issue :
6
fYear :
2010
fDate :
3/15/2010 12:00:00 AM
Firstpage :
398
Lastpage :
400
Abstract :
We report on the first demonstration of guiding light in horizontal slot-waveguides using a plasma-enhanced chemical vapor deposition silicon carbide (SiC)-silicon oxide (SiO2)-SiC structure. Propagation losses of 23.9 ??1.2 dB/cm have been measured for the quasi-transverse-magnetic mode of the fabricated slot waveguides at 1.3 ??m .
Keywords :
integrated optics; optical losses; optical waveguides; plasma CVD; silicon compounds; wide band gap semiconductors; SiC-SiO2-SiC; horizontal slot waveguides; integrated optics; plasma-enhanced chemical vapor deposition; propagation loss; quasi-transverse-magnetic mode; wavelength 1.3 mum; Integrated optics; optical waveguides;
fLanguage :
English
Journal_Title :
Photonics Technology Letters, IEEE
Publisher :
ieee
ISSN :
1041-1135
Type :
jour
DOI :
10.1109/LPT.2009.2039933
Filename :
5378641
Link To Document :
