DocumentCode :
1381369
Title :
Gate Voltage Influence on the Channel Hot-Carrier Degradation of High- k -Based Devices
Author :
Amat, E. ; Kauerauf, T. ; Degraeve, R. ; Rodríguez, R. ; Nafría, M. ; Aymerich, X. ; Groeseneken, G.
Author_Institution :
Electron. Eng. Dept., Univ. Autonoma de Barcelona, Bellaterra, Spain
Volume :
11
Issue :
1
fYear :
2011
fDate :
3/1/2011 12:00:00 AM
Firstpage :
92
Lastpage :
97
Abstract :
In ultrascaled complimentary metal-oxide-semiconductor technologies, the lucky-electron model does not describe correctly Channel Hot-Carrier (CHC) degradation for typical transistor test conditions independently of the gate dielectric (SiO2 or high- k). A new model to describe the CHC degradation behavior in n-channel metal-oxide field-effect transistors, based on the dominant role of the gate voltage into the total CHC stress, is presented. This new model can be applicable to long- and short-channel transistors with high- k or SiO2 as a dielectric.
Keywords :
MOSFET; high-k dielectric thin films; hot carriers; semiconductor device reliability; silicon compounds; SiO2; channel hot-carrier degradation; gate voltage; high-k-based devices; lucky-electron model; metal-oxide field-effect transistors; High-$k$; hot carriers; reliability;
fLanguage :
English
Journal_Title :
Device and Materials Reliability, IEEE Transactions on
Publisher :
ieee
ISSN :
1530-4388
Type :
jour
DOI :
10.1109/TDMR.2010.2093138
Filename :
5638616
Link To Document :
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