• DocumentCode
    1381690
  • Title

    Thin film loading effects on SAW velocity dispersion curves

  • Author

    Hadjoub, Z. ; Beldi, I. ; Bouloudnine, M. ; Gacem, A. ; Doghmane, A.

  • Author_Institution
    Inst. de Math., Annaba Univ., Algeria
  • Volume
    34
  • Issue
    3
  • fYear
    1998
  • fDate
    2/5/1998 12:00:00 AM
  • Firstpage
    313
  • Lastpage
    315
  • Abstract
    Surface acoustic waves propagating on several thin film materials (Cr, Cu, Mo, SiO2, V, ZnO and Zr) of various thicknesses, deposited on different substrates (silicon, quartz, and sapphire), have been investigated. From the initial slope of the velocity dispersion curves it is shown that, for small thicknesses, the loading effect is responsible for the decrease in phase velocities; a simple universal relation between relative velocity changes and material densities is proposed
  • Keywords
    Rayleigh waves; surface acoustic waves; ultrasonic dispersion; ultrasonic velocity; Al2O3; Cr; Cu; Mo; SAW velocity dispersion curves; Si; SiO2; V; ZnO; Zr; leaky Rayleigh mode; material densities; phase velocities; thin film loading effects; universal relation;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19980189
  • Filename
    677415
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1381690