Title :
Thin film loading effects on SAW velocity dispersion curves
Author :
Hadjoub, Z. ; Beldi, I. ; Bouloudnine, M. ; Gacem, A. ; Doghmane, A.
Author_Institution :
Inst. de Math., Annaba Univ., Algeria
fDate :
2/5/1998 12:00:00 AM
Abstract :
Surface acoustic waves propagating on several thin film materials (Cr, Cu, Mo, SiO2, V, ZnO and Zr) of various thicknesses, deposited on different substrates (silicon, quartz, and sapphire), have been investigated. From the initial slope of the velocity dispersion curves it is shown that, for small thicknesses, the loading effect is responsible for the decrease in phase velocities; a simple universal relation between relative velocity changes and material densities is proposed
Keywords :
Rayleigh waves; surface acoustic waves; ultrasonic dispersion; ultrasonic velocity; Al2O3; Cr; Cu; Mo; SAW velocity dispersion curves; Si; SiO2; V; ZnO; Zr; leaky Rayleigh mode; material densities; phase velocities; thin film loading effects; universal relation;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19980189
