Title :
Modelling, simulation and optimization for a SThm nanoprobe
Author :
Bin Yang ; Lenczner, M. ; Cogan, S. ; Menges, Fabian ; Riel, Heike ; Gotsmann, Bernd ; Janus, Pawel ; Boetch, Guillaume
Author_Institution :
FEMTO-ST, Univ. of Franche-Comte, Belfort, France
Abstract :
This paper presents modelling, simulation and optimization results for a novel SThm probe. The model takes into account thermo-electro-mechanical equations. Moreover, a tip-surface contact model derived by taking into account microscopic multi-asperity contact is proposed and discussed. Results of multi-objective optimization are reported, and finally a multi-scale model that should reduce the simulation time is stated.
Keywords :
scanning probe microscopy; SThm nanoprobe; microscopic multiasperity contact; multiobjective optimization; multiscale model; scanning thermal microscopy; thermoelectromechanical equations; tip-surface contact model; Abstracts; Heating; Optimization; Probes; Asymptotic model; Interface thermal conductance; Multi-objective optimization; Nanoprobe; Scanning thermal microscopy; Tip-surface contact;
Conference_Titel :
Thermal, mechanical and multi-physics simulation and experiments in microelectronics and microsystems (eurosime), 2014 15th international conference on
Conference_Location :
Ghent
Print_ISBN :
978-1-4799-4791-1
DOI :
10.1109/EuroSimE.2014.6813869
