DocumentCode :
1382485
Title :
Normally On/Off Integrated Latching Acceleration Switch With Controlled Fracture Beams and Independent Multicontact
Author :
Guo, Zhongyang ; Zhao, Qiancheng ; Lin, Longtao ; Yang, Zhenchuan ; Xie, Huikai ; Yan, Guizhen
Author_Institution :
Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China
Volume :
31
Issue :
2
fYear :
2010
Firstpage :
129
Lastpage :
131
Abstract :
This letter reports an acceleration latching switch with integrated normally on/off paths. The normally on path, formed by notched beams connected in series, will be broken and latched to reach the open state when the acceleration exceeds the threshold. A multicontact is adopted for the normally off path, while both paths are mechanically separated from the proof mass to prevent them from the impact of the proof mass at the latched state. Experimental results show that the latching shock is 10 000 G, and the response time is about 0.1 ms. The normally on path has an on-state resistance of 4.0 ?? and an allowable current of 200 mA, whereas the normally off path has an on-state resistance of 3.8 ?? and a maximum current of 140 mA.
Keywords :
electrical contacts; microswitches; controlled fracture beams; current 140 mA; current 200 mA; independent multicontact; integrated latching acceleration switch; proof mass; resistance 3.8 ohm; resistance 4.0 ohm; Acceleration switches; integrated; latching switches; microelectromechanical devices; normally off; normally on;
fLanguage :
English
Journal_Title :
Electron Device Letters, IEEE
Publisher :
ieee
ISSN :
0741-3106
Type :
jour
DOI :
10.1109/LED.2009.2036575
Filename :
5382602
Link To Document :
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