Millimeter-wave silicon MMIC interconnect and coupler using multilayer polyimide technology

Author

Kim, Juno ; Qian, Yongxi ; Feng, Guojin ; Ma, Pingxi ; Chang, M. Frank ; Itoh, Tatsuo

Author_Institution

Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA

Volume

48

Issue

9

fYear

2000

fDate

9/1/2000 12:00:00 AM

Firstpage

1482

Lastpage

1487

Abstract

This paper reports our latest progress in developing low-loss and low-crosstalk silicon MMIC interconnects for millimeter-wave applications. The proposed silicon/metal/polyimide (SIMPOL) structure based on multilayer polyimide technology is extremely effective in reducing noise crosstalk, and also provides very low line loss, even at the millimeter-wave regime. The measurement results of the developed SIMPOL structures demonstrate extremely low noise crosstalk (<-40 dB) in the entire frequency range (up to 50 GHz), which is limited by the dynamic range of the measurement equipment, and excellent insertion loss (<-0,25 dB/mm) up to 45 GHz. In addition, the SIMPOL concept is applied for the first time successfully in the design and fabrication of branch-line hybrids at millimeter-wave frequencies, 30 and 37 GHz

Keywords

MIMIC; crosstalk; elemental semiconductors; integrated circuit interconnections; losses; mixed analogue-digital integrated circuits; silicon; waveguide couplers; 30 to 50 GHz; MMIC coupler; MMIC interconnect; SIMPOL structure; Si; branch-line hybrids; crosstalk; dynamic range; insertion loss; line loss; millimeter-wave MMIC; multilayer polyimide technology; Crosstalk; Frequency measurement; Loss measurement; MMICs; Millimeter wave measurements; Millimeter wave technology; Noise measurement; Nonhomogeneous media; Polyimides; Silicon;

fLanguage

English

Journal_Title

Microwave Theory and Techniques, IEEE Transactions on

Publisher

ieee

ISSN

0018-9480

Type

jour

DOI

10.1109/22.868998

Filename

868998