Title :
Measurement of temporal behavior of electron density in a discharge-pumped ArF excimer laser
Author :
Nagai, Shinji ; Furuhashi, Hideo ; Kono, Akihiro ; Uchida, Yoshiyuki ; Goto, Toshio
Author_Institution :
Dept. of Quantum Eng., Nagoya Univ., Japan
fDate :
6/1/1998 12:00:00 AM
Abstract :
Time-resolved number densities of electrons in a discharge-pumped ArF excimer laser are measured by an interferometric method. The peak electron density is 6.7×1015 cm-3 at a total gas pressure of 2.5 atom, a gas mixture ratio of F2-Ar-He=0.2-10.0-89.8, and a charging voltage of 24 kV for a 68-nF storage capacitor bank. The dependences of the electron density and laser output power on the Ar and F2 fractions in Ar-F2-He mixture and on the Ne-He mixing ratio in Ar-F2 -He-Ne mixture are investigated, and the effects of Ar-F2 -He-Ne mixing ratio on the ArF laser discharge are discussed. The experimental data of the peak electron density are also compared with the results of a computer simulation. A good agreement between them was obtained by considering the fact that the actual discharge volume occupied only part of the electrode width
Keywords :
argon compounds; discharges (electric); electron density; excimer lasers; gas mixtures; laser variables measurement; light interferometry; 2.5 atm; 24 kV; 68 nF; Ar-F2-He; Ar-F2-He mixture; Ar-F2-He-Ne; ArF; charging voltage; computer simulation; discharge volume; discharge-pumped ArF excimer laser; electrode width; electron density; gas mixture ratio; interferometric method; laser output power; nF storage capacitor bank; peak electron density; temporal behavior; time-resolved number densities; total gas pressure; Argon; Atomic beams; Atomic measurements; Capacitors; Density measurement; Electrons; Gas lasers; Power generation; Power lasers; Voltage;
Journal_Title :
Quantum Electronics, IEEE Journal of
