• DocumentCode
    1383505
  • Title

    Signal amplification with multilayer arrangements on chemical quartz-crystal-resonator sensors

  • Author

    Lucklum, Ralf ; Behling, Jean-Michel ; Hauptmann, Peter

  • Author_Institution
    Inst. for Micro- & Sensor Syst., Otto-von-Guericke-Univ., Magdeburg, Germany
  • Volume
    47
  • Issue
    5
  • fYear
    2000
  • Firstpage
    1246
  • Lastpage
    1252
  • Abstract
    Viscoelastic properties of chemically sensitive coatings can enhance the mass sensitivity of quartz-crystal-microbalance (QCM) sensors. If analyte sorption is accompanied by a change of the viscoelastic properties of the coating material, the accumulated mass cannot be calculated from the frequency shift without further information. We developed a sensor concept, which is based on a double-layer arrangement, permitting acoustic amplification and chemical sensitivity to be separated. With a proper selection of materials, the first layer realizes a constant acoustic amplification of the mass effect; the chemically sensitive layer acts purely gravimetrically. Major sensor design parameters are the shear modulus and the thickness of the first layer. From the acoustic point of view, the thickness of the chemically active layer and its material properties are less critical; a glasslike, rigid coating is preferred for a stable sensor transfer function. Simultaneous measurement of the resonant frequency of the quartz crystal and its motional resistance can be exploited to check the acoustic amplification.
  • Keywords
    acoustic wave amplification; chemical sensors; crystal resonators; microbalances; multilayers; quartz; viscoelasticity; SiO/sub 2/; acoustic amplification; chemical sensor; mass sensitivity; multilayer structure; quartz crystal microbalance; quartz crystal resonator; transfer function; viscoelastic coating; Acoustic materials; Acoustic sensors; Chemical sensors; Coatings; Elasticity; Frequency; Information analysis; Material properties; Nonhomogeneous media; Viscosity;
  • fLanguage
    English
  • Journal_Title
    Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0885-3010
  • Type

    jour

  • DOI
    10.1109/58.869072
  • Filename
    869072