A fully integrated self-calibrating transmitter/receive IC for an ultrasound presence detector microsystem

Author

Kuratli, Christoph ; Huang, Qiuting

Author_Institution

Integrated Syst. Lab., Swiss Fed. Inst. of Technol., Zurich, Switzerland

Volume

33

Issue

6

fYear

1998

fDate

6/1/1998 12:00:00 AM

Firstpage

832

Lastpage

841

Abstract

A fully integrated transmitter/receiver ASIC for an ultrasound presence detection microsystem is described. The transducers consist of thermally excited silicon membranes which are fabricated using a standard silicon circuit technology plus one additional etching step. The mixed-signal chip is realized with no external components. It can be configured as either the transmitter or the receiver of the microsystem. As a transmitter, the silicon transducer is used as an electromechanical resonator to emit ultrasound at 80 kHz. In receive mode, the sensor sensitivity is automatically maximized by a self-calibrating scheme which tunes the receiver membrane resonant frequency to that of the transmitter

Keywords

BiCMOS integrated circuits; calibration; membranes; micromechanical resonators; microsensors; mixed analogue-digital integrated circuits; object detection; sensitivity; silicon; transceivers; ultrasonic applications; ultrasonic transducers; 80 kHz; ASIC; Si; US detector; electromechanical resonator; etching; mixed-signal chip; receiver membrane resonant frequency tuning; self-calibrating transmitter/receive IC; sensor sensitivity; thermally excited Si membranes; transducers; ultrasound presence detector microsystem; Application specific integrated circuits; Biomembranes; Electromechanical sensors; Etching; Integrated circuit technology; Resonant frequency; Silicon; Transmitters; Ultrasonic imaging; Ultrasonic transducers;

fLanguage

English

Journal_Title

Solid-State Circuits, IEEE Journal of

Publisher

ieee

ISSN

0018-9200

Type

jour

DOI

10.1109/4.678642

Filename

678642