DocumentCode
1384819
Title
Surface roughness and contact angle of bias sputtered CoCrTa film
Author
Chandrasekhar, R. ; Mapps, D.J. ; Blunt, L.
Author_Institution
Centre for Res. in Inf. Storage Technol., Univ. of Plymouth, Devon, UK
Volume
32
Issue
5
fYear
1996
fDate
9/1/1996 12:00:00 AM
Firstpage
3681
Lastpage
3683
Abstract
Surface roughness of bias sputtered CoCrTa films on glass substrates were studied using an Atomic Force Microscope (AFM) and an interferometer (non contact) optical technique (IOT). Contact angles of the coated disks were measured using a goniometer microscope. Wear tests were performed on the bias sputtered films. The results of these investigations are presented
Keywords
atomic force microscopy; chromium alloys; cobalt alloys; contact angle; light interferometry; magnetic thin films; sputtered coatings; surface topography; tantalum alloys; wear; CoCrTa; atomic force microscopy; bias sputtered CoCrTa film; contact angle; glass substrate; goniometer microscopy; noncontact interferometer optical technique; surface roughness; wear; Atom optics; Atomic force microscopy; Atomic measurements; Glass; Optical films; Optical interferometry; Optical microscopy; Rough surfaces; Substrates; Surface roughness;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.538727
Filename
538727
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