Title :
Surface roughness and contact angle of bias sputtered CoCrTa film
Author :
Chandrasekhar, R. ; Mapps, D.J. ; Blunt, L.
Author_Institution :
Centre for Res. in Inf. Storage Technol., Univ. of Plymouth, Devon, UK
fDate :
9/1/1996 12:00:00 AM
Abstract :
Surface roughness of bias sputtered CoCrTa films on glass substrates were studied using an Atomic Force Microscope (AFM) and an interferometer (non contact) optical technique (IOT). Contact angles of the coated disks were measured using a goniometer microscope. Wear tests were performed on the bias sputtered films. The results of these investigations are presented
Keywords :
atomic force microscopy; chromium alloys; cobalt alloys; contact angle; light interferometry; magnetic thin films; sputtered coatings; surface topography; tantalum alloys; wear; CoCrTa; atomic force microscopy; bias sputtered CoCrTa film; contact angle; glass substrate; goniometer microscopy; noncontact interferometer optical technique; surface roughness; wear; Atom optics; Atomic force microscopy; Atomic measurements; Glass; Optical films; Optical interferometry; Optical microscopy; Rough surfaces; Substrates; Surface roughness;
Journal_Title :
Magnetics, IEEE Transactions on
