Title :
On the calibration of multicomponent microforce sensors
Author :
Jin, Wenlin ; Mote, C.D., Jr.
Author_Institution :
Sch. of Mech. & Production Eng., Nanyang Technol. Univ., Singapore
fDate :
6/1/1998 12:00:00 AM
Abstract :
A calibration method for multicomponent microforce sensors using Lorentz forces is proposed. The method permits generation of six force and moment components in three orthogonal directions on two-dimensional (2-D) structures that can be fabricated through existing silicon micromachining technology. Two multicomponent microforce sensor and calibration devices were developed and tested to verify the method
Keywords :
calibration; force measurement; micromachining; microsensors; 2D structures; Lorentz forces; calibration; micromachining technology; multicomponent microforce sensors; orthogonal directions; Calibration; Chemical sensors; Conductors; Fabrication; Force control; Force measurement; Force sensors; Mechanical sensors; Silicon; Two dimensional displays;
Journal_Title :
Microelectromechanical Systems, Journal of
