Independent tuning of linear and nonlinear stiffness coefficients [actuators]

Author

Adams, Scott G. ; Bertsch, Fred M. ; Shaw, Kevin A. ; MacDonald, Noel C.

Author_Institution

TMS Technol. Inc., Ithaca, NY, USA

Volume

7

Issue

2

fYear

1998

fDate

6/1/1998 12:00:00 AM

Firstpage

172

Lastpage

180

Abstract

Using a combination of electrostatic actuators, we present a method to independently tune the linear and nonlinear stiffness coefficients of a uniaxial micromechanical device. To demonstrate the method´s capability, we investigated the tuning of an oscillator with linear and cubic restoring forces. We successfully tuned the cubic stiffness from 0.31×10¹¹ to -5.1×10¹¹ N/m³ without affecting the resonant frequency or the linear stiffness. Numerical results are presented which characterize the actuators and indicate important design parameters. Finally, issues such as actuator design, quadratic stiffness, and stability are discussed

Keywords

capacitance; elastic constants; electrostatic devices; microactuators; micromechanical resonators; stability; actuator design; cubic restoring forces; design parameters; electrostatic actuators; independent tuning; linear restoring forces; linear stiffness coefficients; nonlinear stiffness coefficients; quadratic stiffness; stability; tunable resonators; uniaxial micromechanical device; Capacitance; Electrostatic actuators; Hydraulic actuators; Micromechanical devices; Oscillators; Resonant frequency; Solids; Spine; Stability; Tuning;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.679344

Filename

679344