Title :
Fully integrated magnetically actuated micromachined relays
Author :
Taylor, William P. ; Brand, Oliver ; Allen, Mark G.
Author_Institution :
Teledyne Relays, Hawthorne, CA, USA
fDate :
6/1/1998 12:00:00 AM
Abstract :
A fully integrated magnetically actuated micromachined relay has been successfully fabricated and tested. This particular device uses a single-layer coil to actuate a movable upper magnetically responsive platform. The minimum current for actuation was 180 mA, resulting in an actuation power of 33 mW. Devices have been tested which can make and break 1.2 A of current through the relay contacts when the relay is electromagnetically switched. Operational lifetimes in excess of 850000 operations have been observed. Contact resistances as low as 22.4 mΩ have been observed under electromagnetic actuation. Magnetic and structural finite-element (FE) simulations have been performed using ANSYS to calculate both the actuation and contact forces
Keywords :
contact resistance; electromagnetic devices; finite element analysis; life testing; microactuators; micromachining; micromechanical devices; relays; 1.2 A; 180 mA; 22.4 mohm; 33 mW; ANSYS; actuation forces; contact forces; contact resistances; electromagnetic actuation; finite-element simulations; fully integrated micromachined relays; magnetic FE simulations; magnetically actuated micromachined relays; microrelays; movable upper magnetically responsive platform; single-layer coil; structural FE simulations; Coils; Contact resistance; Electrostatics; Fabrication; Magnetic devices; Microrelays; Relays; Switches; Testing; Voltage;
Journal_Title :
Microelectromechanical Systems, Journal of
