• DocumentCode
    1385397
  • Title

    Asymmetric DC-magnetron sputtered carbon-nitrogen thin-film overcoat for rigid-disk applications

  • Author

    Lal, Brij B. ; Yang, Ming M. ; Chao, James ; Russa, Michael A.

  • Author_Institution
    HMT Technol., Fremont, CA, USA
  • Volume
    32
  • Issue
    5
  • fYear
    1996
  • fDate
    9/1/1996 12:00:00 AM
  • Firstpage
    3774
  • Lastpage
    3776
  • Abstract
    An asymmetric DC-magnetron sputtering technique was evaluated to deposit carbon-nitrogen (C:N) overcoats for rigid-disk applications. The tribological characteristics of very thin C:N overcoats (~100 Å) were investigated by using thin-film flying inductive heads, Tripad-proximity recording heads, and carbon-coated magneto-resistive (MR)-heads in different test environments. Comparison of >20 K contact start-stop (CSS) test cycles showed superior stiction and durability performance for the asymmetric DC-magnetron sputtered (asym-C:N) films compared to standard symmetric DC-magnetron sputtered (sym-C:N) films. After CSS testing, no visible wear marks and/or head-build up were observed. Comparison of stress and hardness data showed a reduction of internal stress without noticeable change in hardness for asym-C:N films. Also, elemental analysis showed higher nitrogen content in asym-C:N films. In addition, Raman spectroscopy data suggest that the asym-C:N films have higher sp3 content than that of sym-C:N films, which can contribute to greater durability
  • Keywords
    carbon; hard discs; hardness; internal stresses; magnetic recording; nitrogen; sputtered coatings; tribology; C:N; CSS test cycles; Raman spectroscopy; Tripad-proximity recording head; asymmetric DC-magnetron sputtering; carbon-nitrogen thin-film overcoat; durability; elemental analysis; hardness; internal stress; magneto-resistive head; rigid disk; stiction; thin-film flying inductive head; tribological characteristics; Amorphous magnetic materials; Cascading style sheets; Cathodes; Internal stresses; Magnetic films; Magnetic heads; Nitrogen; Optical films; Sputtering; Testing;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/20.538832
  • Filename
    538832