DocumentCode
1385666
Title
Thin-film, accumulation-mode p -channel SOI MOSFETs
Author
Colinge, J.D.
Author_Institution
Hewlett Packard CT R&D, Palo Alto, CA
Volume
24
Issue
5
fYear
1988
fDate
3/3/1988 12:00:00 AM
Firstpage
257
Lastpage
258
Abstract
Electrical characteristics of thin-film (100 nm), accumulation-mode SOI p -channel MOSFETs are reported and compared to simulation. In the OFF regime, the p -type channel is fully depleted. As a result, very low values of leakage current are obtained. Very good threshold voltage control is also obtained
Keywords
insulated gate field effect transistors; thin film transistors; SIMOX wafers; SOI MOSFETs; Si; TFT; accumulation-mode; leakage current; p-channel; simulation; thin film transistors; threshold voltage control;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
Filename
5642
Link To Document