DocumentCode
1386619
Title
Love-wave biosensors using cross-linked polymer waveguides on LiTaO3 substrates
Author
Bender, Florian ; Cernosek, R.W. ; Josse, Fabien
Author_Institution
Dept. of Microsensor R&D, Sandia Nat. Labs., Albuquerque, NM, USA
Volume
36
Issue
19
fYear
2000
Firstpage
1672
Lastpage
1673
Abstract
The design and performance of Love-wave sensors using crosslinked poly(methyl methacrylate) waveguides of thicknesses of 0.3 to 3.21 μm on LiTaO3 substrates are described. It is found that this layer-substrate combination provides sufficient waveguidance and electrical isolation of the interdigital transducers from the liquid environment to achieve low acoustic loss and distortion. In biosensing experiments, mass sensitivity up to 1420 Hz(ng/mm2) is demonstrated.
Keywords
biosensors; 0.3 to 3.2 mum; LiTaO3; LiTaO3 substrates; Love-wave biosensors; acoustic loss; cross-linked polymer waveguides; electrical isolation; interdigital transducers; mass sensitivity; poly(methyl methacrylate);
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
Filename
871137
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