Title :
Fabrication of 2×2 tapered multimode interference coupler
Author :
Wei, Hongzhen ; Yu, Jinzhong ; Liu, Zhongli ; Zhang, Xioafeng ; Shi, Wei ; Fang, Changshui
Author_Institution :
Inst. of Semicond., Acad. Sinica, Beijing, China
fDate :
9/14/2000 12:00:00 AM
Abstract :
The authors demonstrate a 3 dB 2×2 parabolically tapered multimode interference (MMI) coupler with a large cross-section and space between the different ports using silicon-on-insulator technology. The device exhibits a uniformity of <0.8 dB and can be used in the realisation of an MMI-based optical switch with a high extinction ratio
Keywords :
light interference; optical couplers; optical design techniques; optical fabrication; optical planar waveguides; optical switches; rib waveguides; silicon-on-insulator; 2×2 tapered multimode interference coupler; MMI-based optical switch; Si-SiO2; Si-on-insulator technology; extinction ratio; fabrication; multimode interference-based optical switch; parabolically tapered multimode interference coupler; uniformity;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20001166
