DocumentCode
1386885
Title
Thick-film PZT-silicon micromechanical resonator
Author
Beeby, S.P. ; White, N.M.
Author_Institution
Dept. of Electron. & Comput. Sci., Southampton Univ., UK
Volume
36
Issue
19
fYear
2000
fDate
9/14/2000 12:00:00 AM
Firstpage
1661
Lastpage
1662
Abstract
A micromechanical silicon beam resonator in which the vibrations are driven and detected by thick-film printed piezoelectric elements is presented. Standard micromachining and thick-film processes have been successfully combined to fabricate the device. The resonator, 2 mm long and 0.52 mm wide has a fundamental mode in air at 56.5 kHz with a Q-factor of 70
Keywords
elemental semiconductors; lead compounds; micromachining; micromechanical resonators; piezoelectric devices; silicon; thick films; 0.52 mm; 2 mm; 56.5 kHz; PZT-Si; PbZrO3TiO3-Si; Q-factor; fundamental mode; micromachining; micromechanical resonator; thick-film printed piezoelectric elements;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20001139
Filename
871177
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